"Proximity Effect Corrections in Electron Beam Lithography."

Robert C. Frye, Kevin D. Cummings, Edward A. Rietman (1990)

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DOI: —

access: open

type: Conference or Workshop Paper

metadata version: 2020-03-06

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  - https://dblp.org/rec/conf/nips/FryeCR90
Robert C. Frye, Kevin D. Cummings, Edward A. Rietman:
Proximity Effect Corrections in Electron Beam Lithography. NIPS 1990: 443-449

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