"Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch."

Abdurrashid Hassan Shuaibu, Yves Blaquière, Frédéric Nabki (2023)

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DOI: 10.1109/NEWCAS57931.2023.10198185

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-15

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Abdurrashid Hassan Shuaibu, Yves Blaquière, Frédéric Nabki:
Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch. NEWCAS 2023: 1-4

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