"Development of a novel bidirectional electrothermal actuator and its ..."

Yanqing Zhu et al. (2014)

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DOI: 10.1109/NEMS.2014.6908786

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Yanqing Zhu, Lei Han, Ming Qin, Qing-An Huang, Ming-xia Jiang:
Development of a novel bidirectional electrothermal actuator and its application to RF MEMS switch. NEMS 2014: 180-185

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