"Fabrication and performance of Microplasma Reactor for maskless scanning ..."

Qiuping Zhang et al. (2010)

> Home

Details and statistics

DOI: 10.1109/NEMS.2010.5592188

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/ZhangWXC10
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/ZhangWXC10
Qiuping Zhang, Li Wen, Weiwei Xiang, Jiaru Chu:
Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching. NEMS 2010: 211-214

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.