"An electro-thermal SU-8 cantilever micro actuator based on bimorph effect."

Xiaobo Zhang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592235

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xiaobo Zhang, Yibo Wu, Xiaodan Miao, Congchun Zhang, Guifu Ding:
An electro-thermal SU-8 cantilever micro actuator based on bimorph effect. NEMS 2010: 362-365

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