"A SOI sandwich differential capacitance accelerometer with low-stress package."

Yangxi Zhang et al. (2014)

> Home

Details and statistics

DOI: 10.1109/NEMS.2014.6908822

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/ZhangGMH14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/ZhangGMH14
Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong Hao:
A SOI sandwich differential capacitance accelerometer with low-stress package. NEMS 2014: 341-345

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.