"Design and Manufacture of a High Precision MEMS Flexible Force Sensor."

Huimin Zhang, Yanlu Feng, Wei Zhang (2021)

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DOI: 10.1109/NEMS51815.2021.9451519

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Huimin Zhang, Yanlu Feng, Wei Zhang:
Design and Manufacture of a High Precision MEMS Flexible Force Sensor. NEMS 2021: 687-690

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