"Confined etchant layer technique (CELT) for micromanufacture."

Dongping Zhan et al. (2011)

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DOI: 10.1109/NEMS.2011.6017490

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Dongping Zhan, Lianhuan Han, Dezhi Yang, Li-min Jiang, Jing Tang, Jian-jun Sun, Kang Shi, Jianzhang Zhou, Zhong-Qun Tian, Zhao-Wu Tian:
Confined etchant layer technique (CELT) for micromanufacture. NEMS 2011: 863-867

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