"A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure ..."

Mingzhi Yu et al. (2019)

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DOI: 10.1109/NEMS.2019.8915619

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Mingzhi Yu, Libo Zhao, Chen Jia, Hongyan Wang, Yulong Zhao, Zhuangde Jiang:
A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure Axial Deformation. NEMS 2019: 176-180

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