"A Resonant High Pressure Sensor Based on Dual Cavities Design."

Jie Yu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451443

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Jie Yu, Yulan Lu, Deyong Chen, Junbo Wang, Bo Xie:
A Resonant High Pressure Sensor Based on Dual Cavities Design. NEMS 2021: 1725-1728

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