"The coupling error analysis of the decoupled silicon Micro-Gyroscope."

Bo Yang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592238

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Bo Yang, Shourong Wang, Hongsheng Li, Libin Huang, Kunyu Li, Yong Yin:
The coupling error analysis of the decoupled silicon Micro-Gyroscope. NEMS 2010: 356-361

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