"Three dimensional micro-mechanical and micro-optical devices fabricated by ..."

Liang Yang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559811

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-31

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Liang Yang, Jiawen Li, Jinli Wang, Chenchu Zhang, Yanlei Hu, Yahui Su, Wenhao Huang, Jiaru Chu:
Three dimensional micro-mechanical and micro-optical devices fabricated by holographic two-photon lithography. NEMS 2013: 641-644

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