"Fabrication of metal embedded photo-mask for sub-micrometer scaled ..."

Jhih-Nan Yan, Yung-Chun Lee (2012)

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DOI: 10.1109/NEMS.2012.6196717

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jhih-Nan Yan, Yung-Chun Lee:
Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate. NEMS 2012: 36-39

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