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"A design of spring constant arranged for MEMS accelerometer by multi-layer ..."
Daisuke Yamane et al. (2016)
- Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone
, Kazuya Masu, Katsuyuki Machida:
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. NEMS 2016: 419-422
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