"Design and simulation of micro-platform for MEMS devices applied in shock ..."

Kaisi Xu et al. (2015)

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DOI: 10.1109/NEMS.2015.7147464

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Kaisi Xu, Ningli Zhu, Qingying Zhan, Weiguo Su, Wei Zhang, Yilong Hao:
Design and simulation of micro-platform for MEMS devices applied in shock environment. NEMS 2015: 445-448

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