"Design and simulation of MEMS thermal and vibration isolator based on PDMS ..."

Kaisi Xu et al. (2016)

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DOI: 10.1109/NEMS.2016.7758235

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-05

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Kaisi Xu, Ningli Zhu, Shan Cao, Weiguo Su, Wei Zhang, Yilong Hao:
Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays. NEMS 2016: 213-216

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