"Electrochemical Nanoimprint Lithography."

Hantao Xu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451284

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Hantao Xu, Lianhuan Han, Bingqian Du, Yang Wang, Zhen Ma, Zhong-Qun Tian, Zhao-Wu Tian, Dongping Zhan:
Electrochemical Nanoimprint Lithography. NEMS 2021: 1337-1340

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