"A novel method for the manufacture of MEMS devices with large exposed area ..."

Jianbing Xie, Weizheng Yuan, Honglong Chang (2009)

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DOI: 10.1109/NEMS.2009.5068571

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Jianbing Xie, Weizheng Yuan, Honglong Chang:
A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. NEMS 2009: 253-256

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