"Electrical and optical testing system for microplasma in scanning plasma ..."

Weiwei Xiang et al. (2009)

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DOI: 10.1109/NEMS.2009.5068645

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Weiwei Xiang, Li Wen, Hai Wang, Qiuping Zhang, Jiaru Chu:
Electrical and optical testing system for microplasma in scanning plasma etching. NEMS 2009: 572-576

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