"6-DOF Inertial Sensor Development with Advanced Fabrication Platform."

Guoqiang Wu et al. (2018)

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DOI: 10.1109/NEMS.2018.8556938

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-06

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Guoqiang Wu, Beibei Han, Daw Don Cheam, Peter Hyun Kee Chang, Navab Singh, Yuandong Gu:
6-DOF Inertial Sensor Development with Advanced Fabrication Platform. NEMS 2018: 208-211

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