"Design and implementation of software system of E-beam lithography based ..."

Shuhua Wei, Jinzhao Zhang, Li Han (2009)

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DOI: 10.1109/NEMS.2009.5068639

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Shuhua Wei, Jinzhao Zhang, Li Han:
Design and implementation of software system of E-beam lithography based on SEM. NEMS 2009: 547-550

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