"In-plane-excited silicon nanowire arrays-patterned cantilever sensors for ..."

Hutomo Suryo Wasisto et al. (2014)

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DOI: 10.1109/NEMS.2014.6908753

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Hutomo Suryo Wasisto, Stephan Merzsch, Frederik Steib, Andreas Waag, Erwin Peiner:
In-plane-excited silicon nanowire arrays-patterned cantilever sensors for enhanced airborne particulate matter exposure detection. NEMS 2014: 32-37

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