"High performance piezoresistive accelerometer based on the slot etching in ..."

Peng Wang et al. (2017)

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DOI: 10.1109/NEMS.2017.8017052

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Peng Wang, Yulong Zhao, You Zhao, Qi Zhang, Zixi Wang:
High performance piezoresistive accelerometer based on the slot etching in the EB(eight-beam) structure. NEMS 2017: 406-409

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