"Enhancing Sensitivity Using Electrostatic Spring in Coupling ..."

Zheng Wang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451485

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-13

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  - conf/nems/WangXWYLZ21
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Zheng Wang, Xingyin Xiong, Kunfeng Wang, WuHao Yang, ZhiTian Li, XuDong Zou:
Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer. NEMS 2021: 311-314

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