"Sidewall arris flatting process in quartz gyroscope fabrication."

Haoxu Wang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592206

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Haoxu Wang, Liqiang Xie, Xuezhong Wu, Shengyi Li:
Sidewall arris flatting process in quartz gyroscope fabrication. NEMS 2010: 250-254

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