"Micro-fabricated polymeric thermal actuators array for rectifying the ..."

Xinghua Wang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559902

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xinghua Wang, Dingbang Xiao, Zhihua Chen, Zhanqiang Hou, Xuezhong Wu, Jianbin Su:
Micro-fabricated polymeric thermal actuators array for rectifying the deformation of MEMS substrate. NEMS 2013: 1046-1049

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