"Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor."

Ziyu Wang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592244

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Ziyu Wang, Xiaotun Qiu, Jonathon Oiler, Jie Zhu, Hongyu Yu:
Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor. NEMS 2010: 824-827

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