"The effect of micro-spring stiffness changes on the typical MEMS S&A ..."

Dakui Wang et al. (2015)

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DOI: 10.1109/NEMS.2015.7147456

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/WangLXWLJL15
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Dakui Wang, Wenzhong Lou, Yongjia Xiong, Fufu Wang, Fangyi Liu, Xin Jin, Jun Lu:
The effect of micro-spring stiffness changes on the typical MEMS S&A device. NEMS 2015: 413-416

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