"Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump ..."

Tuan Ngoc Anh Vo, Pin-Chuan Chen, Yu-Hsiang Chen (2022)

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DOI: 10.1109/NEMS54180.2022.9791205

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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Tuan Ngoc Anh Vo, Pin-Chuan Chen, Yu-Hsiang Chen:
Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate. NEMS 2022: 1-5

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