"A new process for thermally stable CMOS MEMS capacitive sensors."

Siew-Seong Tan et al. (2011)

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DOI: 10.1109/NEMS.2011.6017360

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Siew-Seong Tan, Cheng-Yen Liu, Li-Ken Yeh, Yi-Hsiang Chiu, Klaus Y. J. Hsu:
A new process for thermally stable CMOS MEMS capacitive sensors. NEMS 2011: 329-332

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