"Design and analysis of a single-structure three-axis MEMS gyroscope with ..."

Muhammad Ali Shah, Faisal Iqbal, Byeungleul Lee (2016)

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DOI: 10.1109/NEMS.2016.7758229

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Muhammad Ali Shah, Faisal Iqbal, Byeungleul Lee:
Design and analysis of a single-structure three-axis MEMS gyroscope with improved coupling spring. NEMS 2016: 188-191

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