"Fabrication of a multilayer spiral coil by selective bonding, debonding ..."

Tim Schroeder et al. (2016)

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DOI: 10.1109/NEMS.2016.7758277

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

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Tim Schroeder, Joerg Froemel, Shuji Tanaka, Thomas Gessner:
Fabrication of a multilayer spiral coil by selective bonding, debonding and MEMS technologies. NEMS 2016: 401-404

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