"Scaling Effect Induced Rapid Quenching Improves the Performance of ..."

Hao Ren et al. (2020)

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DOI: 10.1109/NEMS50311.2020.9265626

access: closed

type: Conference or Workshop Paper

metadata version: 2020-12-03

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Hao Ren, Weimin Wang, Haichao Cao, Sitao Fei, Yunping Niu, Zhihao Li:
Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors. NEMS 2020: 545-548

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