"High g-factor MEMS vibration platform for in-situ self-calibration of ..."

Feng Qin et al. (2017)

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DOI: 10.1109/NEMS.2017.8017076

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Feng Qin, Xiuyu Zhang, Yijia Du, Gang Dai, Leilei Bao, Jingfu Bao:
High g-factor MEMS vibration platform for in-situ self-calibration of accelerometer. NEMS 2017: 521-525

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