"Research on Key Technology of Novel RF MEMS Switch Designing and Fabricating."

Yun Qi, Yuanyuan Yang, Wenjiang Shen (2021)

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DOI: 10.1109/NEMS51815.2021.9451449

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Yun Qi, Yuanyuan Yang, Wenjiang Shen:
Research on Key Technology of Novel RF MEMS Switch Designing and Fabricating. NEMS 2021: 358-363

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