"Silicon MEMS actuator with no space gap between driving electrodes."

Tomoki Nishino et al. (2016)

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DOI: 10.1109/NEMS.2016.7758312

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-20

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Tomoki Nishino, Kazuki Baba, Yuri Nakai, Hiroshi Tanigawa, Kenichiro Suzuki:
Silicon MEMS actuator with no space gap between driving electrodes. NEMS 2016: 553-556

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