"A study on young's modulus of electroplated gold cantilevers for MEMS devices."

Hideaki Nakajima et al. (2017)

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DOI: 10.1109/NEMS.2017.8017021

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone:
A study on young's modulus of electroplated gold cantilevers for MEMS devices. NEMS 2017: 264-267

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