"Design and measurement of MEMS capacitive ultrasonic transducer."

Jing Miao et al. (2015)

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DOI: 10.1109/NEMS.2015.7147501

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/MiaoSCWHXX15
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Jing Miao, Wenjiang Shen, Muyu Chen, Hui Wang, Changde He, Chenyang Xue, Jijun Xiong:
Design and measurement of MEMS capacitive ultrasonic transducer. NEMS 2015: 602-604

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