"A new electroplating mask for deep wet etching on glass."

Xiaodan Miao et al. (2010)

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DOI: 10.1109/NEMS.2010.5592434

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-12

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  - conf/nems/MiaoDWZZD10
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Xiaodan Miao, Xuhan Dai, Peihong Wang, Xiaopeng Zhang, Xiao-Lin Zhao, Guifu Ding:
A new electroplating mask for deep wet etching on glass. NEMS 2010: 454-457

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