"A Piezoresistive Pressure Microsensor Based on Simplified Fabrication ..."

Qinggang Meng et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451486

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Qinggang Meng, Yulan Lu, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie:
A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes. NEMS 2021: 1465-1469

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