"Processing of 3D multilevel SU-8 fluidic network assisted by PerMX ..."

Robert Ch. Meier et al. (2012)

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DOI: 10.1109/NEMS.2012.6196781

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Robert Ch. Meier, Vlad Badilita, Ulrike Wallrabe, Jan G. Korvink:
Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination. NEMS 2012: 308-311

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