"The method of prevent footing effect in making SOI micro-mechanical structure."

Xu Mao et al. (2009)

> Home

Details and statistics

DOI: 10.1109/NEMS.2009.5068629

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

- view
  authority control:
- export record
  dblp key:
  - conf/nems/MaoYLY09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/MaoYLY09
Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan:
The method of prevent footing effect in making SOI micro-mechanical structure. NEMS 2009: 506-509

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.