"A novel electrodes design for in-plane measurement of single-structure ..."

Jianjun Ma et al. (2023)

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DOI: 10.1109/NEMS57332.2023.10190870

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-25

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Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang:
A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices. NEMS 2023: 205-208

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