"A study of directional MEMS dual-fences gauge."

Chengyu Ma et al. (2015)

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DOI: 10.1109/NEMS.2015.7147465

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Chengyu Ma, Binghe Ma, Jinjun Deng, Xinhang Jin:
A study of directional MEMS dual-fences gauge. NEMS 2015: 449-452

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