"Residual stress characterization of GaN microstructures using bent-beam ..."

Jianan Lv et al. (2010)

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DOI: 10.1109/NEMS.2010.5592164

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jianan Lv, Zhenchuan Yang, Guizhen Yan, Yong Cai, Baoshun Zhang, Kevin J. Chen:
Residual stress characterization of GaN microstructures using bent-beam strain sensors. NEMS 2010: 138-140

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