"A High-sensitivity, Small-size Resonant Pressure Microsensor Based on ..."

Yulan Lu et al. (2019)

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DOI: 10.1109/NEMS.2019.8915640

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Yulan Lu, Sen Zhang, Yadong Li, Bo Xie, Deyong Chen, Junbo Wang, Jian Chen:
A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. NEMS 2019: 488-491

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