"Piezoresistive properties of heavily doped P-type polysilicon films."

Xuebin Lu et al. (2009)

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DOI: 10.1109/NEMS.2009.5068627

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/LuLCSHC09
Xuebin Lu, Xiaowei Liu, Rongyan Chuai, Changzhi Shi, Mingxue Huo, Weiping Chen:
Piezoresistive properties of heavily doped P-type polysilicon films. NEMS 2009: 498-501

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