"CMOS MEMS infrared source based on black silicon."

Weibing Liu et al. (2016)

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DOI: 10.1109/NEMS.2016.7758232

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-05

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Weibing Liu, Anjie Ming, Yaohui Ren, Qiulin Tan, Wen Ou, Xilong Sun, Weibing Wang, Dapeng Chen, Jijun Xiong:
CMOS MEMS infrared source based on black silicon. NEMS 2016: 200-204

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