"Reducing the Effect of Parasitic Capacitance on the Micro-capacitive ..."

Jihang Liu et al. (2019)

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DOI: 10.1109/NEMS.2019.8915594

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Jihang Liu, Lidong Du, Yichen Pan, Yusi Zhu, Zhen Fang, Zhan Zhao:
Reducing the Effect of Parasitic Capacitance on the Micro-capacitive Humidity Sensor. NEMS 2019: 494-497

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