"Stochastic analysis of the elctrothermal microactuator with fabrication error."

Haotian Liu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451482

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Haotian Liu, Hao Chen, Yun Cao, Weirong Nie, Zhanwen Xi, Shenghong Lei:
Stochastic analysis of the elctrothermal microactuator with fabrication error. NEMS 2021: 1287-1290

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